7

Dry etching characteristics of TiN thin films in CF4/BCl3/N2 plasma

Year:
2012
Language:
english
File:
PDF, 929 KB
english, 2012
14

Dry Etch Properties of ZTO Thin Films Using Inductively Coupled Plasma

Year:
2013
Language:
english
File:
PDF, 592 KB
english, 2013
40

Dry etching properties of TiO2 thin films in O2/CF4/Ar plasma

Year:
2013
Language:
english
File:
PDF, 771 KB
english, 2013